半導體料件清潔鍍膜

描述

部件清潔服務

Capabilities of HJT Precision Parts Cleaning

1. Parts Cleaning depend on Equipment Lam：Flex、Metal、Metal L、Metal M、Kiyo、EX、CX TEL：SCCM-SE/TE/TE+、Vigus MX/NX、Jin、Shin AMAT：HDPCVD, Producer CVD/Etch, Centeris / MESA Hitachi / AMEC / Novellus
2. Parts Cleaning depend on Materials
   Silicon, SiC, Al₂O₃ / Y₂O₃ / AlN ceramic, anodized on Al Coated Al₂O₃ / Y₂O₃ / YF₃, Metal (Al, Sus, …)
3. Specialty Parts
   ESC
   Shower Head (bonding ceramic with Aluminum)
   Ceramic Heater

Equipment for Part Cleaning

1. Chemical Bench
2. CO₂ Spray
3. Wet Type Bead Blasting
4. Multi-frequency Ultrasonic Oscillation Equipment
5. Mega-sonic Oscillation Equipment
6. High Temperature Oven
7. Dust-free Oven
8. Vacuum Oven

---

表面鍍膜服務

• N28/20/16/10-Hitachi M8190 HJ1 Coating (HJT CIP)
• N28-LAM Metal L HJ1 Coating (HJT CIP)
• N20-TEL Vigus MX HJ1 Coating (HJT CIP)
• N10-TEL VIGUS IX HJ1 Coating (HJT CIP)
• N40-TEL DRM HJ1 Coating (HJT CIP)
• N40-TEL SCCM HJ1 Coating
• N28-TEL Vigus MX HJ1 Coating
• N28-TEL JIN HJ1 Coating
• N40-AMEC HJ1 Coating

Thermal Spray Demo. Items

• N28-AMAT Producer Etch Y2O3 Coating
• N16/208-AMAT Producer Etch Y2O3 Coating
• N28-LAM Kiyo 45/65 HJ1 Coating
• N20/16- Hitachi 9100 Y2O3 Coating
• N10-LAM Metal M HJ1 / YOF Coating
• N10-LAM Metal EX YOF Coating

Application Parts

• Spray Coating on Ceramic
  
• Spray Coating on Metal
  

Chamber	Process	Particle / Defect Reducing	PM Cycle Prolong	Benefit
Hitachi M8190	N28	90%	x 2.5	Y defect improvement PM cycle prolong
LAM Metal L	N28	60%	x 1.8	Defect improvement PM cycle prolong
TEL Vigus	N20	80%	x 2	Y defect improvement PM cycle stabilized